Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards IXL 120, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | IXL 120Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards IXL 120 |
| Cited variants | — |
|
| Specifications | ||
| Type | — | Dry pump[2] |
| Pumping speed (CFM) | — | 65 CFM[2] |
| Pumping speed (m³/hr) | — | 120 m³/hr[1] |
| Ultimate pressure | — | 0.01 mbar (0.01 Torr)[1] |
| Inlet | — | ISO63 vertical[2] |
| Exhaust | — | KF25[2] |
| Weight | — | 130 lbs[2] |
| Enclosure protection | — | IP31D[1] |
| Cooling water typical flow | — | 4 slm at 3.0 bar[1] |
| Cooling water minimum purity | — | ISO 8573 solids class 1[1] |