Comparison ledger
ASML Twinscan XT 1700 Fi ArF, ASML Twinscan XT 1700 i Immersion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ASML | ASML |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML Twinscan XT 1700 | ASML Twinscan XT 1700 |
| Specifications | ||
| Configuration | SMIF / FOUP[1] | 193nm[3] |
| Excimer Laser | Cymer XLA 360[1] | — |
| Wafer Size | 12 inch (300 mm)[1] | — |
| Wafer Interface | SMIF / FOUP[2] | — |
| Vintage | 2006[1] | 2006[3] |
| Type | — | Immersion scanner[3] |
| Wavelength | — | 193 nm[3] |
| Node | — | 45 nm[3] |
| Throughput | — | 122 wafers per hour[3] |
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