Comparison ledger
Axcelis 17099370 Outer strike plate, Axcelis NV GSD HE Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | NV GSD HE IonAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Axcelis NV GSD HE Ion |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | Refurbished in 2023[3] |
| Manufacturer | Axcelis[2] | — |
| Model | 17099370 Outer strike plate[1] | NV GSD HE[3] |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Wafer size | — | 6" Wafer Handling Station Installed[3] |
| Frequency | — | 60 Hz[4] |
| Phase | — | 3 phase[4] |
| Full Load Current | — | 99 A[3] |
| Power | — | 82 kVA[3] |
| Input Breaker | — | 150 A[3] |
| Amp Rating Largest Load | — | 99 A[4] |
| Max Interrupt Capacity | — | 14 kA[3] |
| Beam Exhaust | — | 1 MeV[4] |
| Beam Current | — | 1 mA[3] |
| Main Computer | — | Solaris, SW 5.3[3] |
| Main Monitor | — | LCD[3] |
| Second Computer | — | Solaris[3] |
| Second Monitor | — | LCD[3] |
| OEM | — | Axcelis[3] |
| Category | — | Ion Implantation[4] |
| Wafer Sizes | — | 6, 8 inch[3] |
| Refurbished | — | 2023[3] |
| Beam Handling | — | Notch[3] |
| Dummy Cassette | — | 25[3] |
| Load Buffer | — | 17[3] |
| Vacuum Cassette | — | 17[3] |
| Beam Profile Oscilloscope | — | Included[3] |
| Wafer Handling Station Installed | — | 6 inch[3] |
| Disk Type | — | ACLS 11003980[3] |
| Gyro & Angle - Type & Degree | — | Alpha & Beta, +/-11 degrees[3] |
| Rotary Driver | — | 1200 rpm[3] |
| HV Power Supply | — | Hunting Hivolt[3] |
| HV Stack | — | Hunting Hivolt[3] |
| AMU | — | Buckley[3] |
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