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200 PCUversusNV 8200 P

Axcelis 200 PCU, Axcelis NV 8200 P, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCUAxcelis
NV 8200 PAxcelis
OEMAxcelisAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2000 Vintage—
Control system——
Generation——
FamilyAxcelis NV GSD 200Axcelis NV 8200 P
Cited variants
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
—
Specifications
P/NSC 4840 A[3]—
Frequency50 Hz[3]—
Phase3 Phase[3]—
Voltage400 V[3]—
Category—Ion Implantation[4]
Wafer sizes—6 inch[5]
Model listing—Axcelis NV 8200 P Implanter[5]
200 PCU entryNV 8200 P entryAsk about these tools →Share experience with this comparison →

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Sources (6)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]Equipment inventory listing
  6. [6]surplus.infineon.comsurplus.infineon.com