Comparison ledger
Denton Vacuum Discovery Cathode, Leybold MAG W 2800 CT Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Discovery CathodeDenton Vacuum | MAG W 2800 CT TurboLeybold |
|---|---|---|
| OEM | Denton Vacuum | Leybold |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum Discovery | Leybold MAG W 2800 CT Turbo |
| Specifications | ||
| Configuration | 12.0" sputtering system with planetary Load lock and robot loading assemblies[2] | Leybold Mag 1300 C[1] |
| Sputtering system size | 12.0 inch[2] | — |
| Chamber dimensions | Approx. 4' X 6' X 12" Stainless Steel Chamber[2] | — |
| Ion source | Veeco 5 cm Gridded Ion Source with Gas Controls[3] | — |
| High vacuum pump | CTI Cryogenics High Vacuum Pump/Blanket Heater[2] | — |
| Cryopump | Torr400 Cryopump with Oxford E500 Dual Temperature Monitor[2] | — |
| Turbo molecular pump | KYKY F400 Turbo Molecular Pump with FV-LII Pump Controller[2] | — |
| Compressor | CTI-Cryogenics 9600 Compressor[2] | — |
| DC power supplies | (4) Advance Energy Pinnacle plus DC Power Supplies[3] | — |
| Cathodes | (4) 12" Cathodes[2] | — |
| Robot | Loader/Unloader with Epson G6-453c Robot, Vintage 9/10[2] | — |
| Controller | Ion Tech Mps-3000 fc Controller[2] | — |
| Load lock | Load Lock Loader with PLC Controller[2] | — |
| Gate valve | Vat Gate Valve[2] | — |
| Adaptive pressure controller | Vat Adaptive Pressure Controller[2] | — |
| Pressure monitors | Assorted Pressure Monitors[2] | — |
| Isolation valves | Isolation Valves[2] | — |
| Power supply/control | Stand Alone Power Supply/Control[2] | — |
| Computer system | Computer System with Related Hardware/Software[2] | — |
| Manufacturer | Denton Vacuum[2] | — |
| Model | Discovery Cathode[2] | MAG W 2800 CT[1] |
| Category | Deposition[3] | — |
| Process type | Sputtering system[3] | — |
| Wafer size | 12.0-inch[3] | — |
| Wafer handling | Planetary load lock and robot loading assemblies[3] | — |
| Chamber | Approx. 4' x 6' x 12" stainless steel chamber[2] | — |
| Vacuum pumps | CTI Cryogenics high vacuum pump/blanket heater; Torr400 cryopump with Oxford E500 dual temperature monitor; KYKY F400 turbo molecular pump with FV-LII pump controller[2] | — |
| Pressure control | Vat gate valve and Vat adaptive pressure controller[2] | — |
| Control system | Ion Tech Mps-3000 fc controller; stand alone power supply/control; computer system with related hardware/software[2] | — |
| Robot loader/unloader | Epson G6-453c robot[2] | — |
| PN | — | 400110 V 0011[1] |
| Type | — | Turbo pump[1] |
| Operating Frequency | — | 480 Hz[4] |
| Usage | — | Vacuum systems[4] |
| OEM | — | Leybold[1] |
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