Waferpedia

Comparison ledger

1007versusOpus 3

KLA 1007, Semics Opus 3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
Opus 3Semics
OEMKLASemics
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—MS Windows XP Professional
Generation——
FamilyKLA 1007Semics Opus
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]2014, 2015, 2016, 2017 (observed units)[3]
MakeKLA[2]—
Equipment typeProber[2]—
Power Supply—200-240 V[3]
Configuration—15 A[3]
Full Load Current—11 A[3]
Max Ampere Rating—25 A[6]
Interruption Capacity—10 kA[6]
Power Supply Voltage—200-240 V[3]
Power Supply Current—15 A[3]
Power Supply Frequency—50/60 Hz[3]
Wafer Sizes—8 inch, 12 inch[5]
Hot Chuck—Included[5]
Communication Interface—GPIB[5]
Operating System—MS Windows XP Professional[5]
Type—Prober[3]
Communication—GBIP[5]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing