Waferpedia

Comparison ledger

.496 PSL WaferversusKY 8030 3D

KLA .496 PSL Wafer, Koh Young KY 8030 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
KY 8030 3DKoh Young
OEMKLAKoh Young
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferKoh Young KY 8030 3D
Cited variants—
Specifications
ConfigurationNIST Traceable[2]—
Wafer size8 inch[2]—
TraceabilityNIST Traceable[2]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[2]—
CategoryMetrology & Inspection[3]—
Inspection Speed (KY8030-2)—11.1 to 59.5 cm²/sec[1]
Max Paste Height (KY8030-2)—450 microns[1]
Resolutions (KY8030-2)—10, 15, 20 or 25 microns[1]
Inspection Speed (KY8030-3)—81.85 cm²/sec at 8 megapixel and 20 microns[1]
Max Inspection Height (KY8030-3)—400 microns[1]
Max Board Length (USX)—1,300 millimetres[1]
Base Model—KY 8030[4]
Vintage—2011[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]kohyoungamerica.comkohyoungamerica.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing