Comparison ledger
Lam Research OnTrak Synergy Post, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | OnTrak Synergy PostLam Research | 120 ContinuousLapmaster |
|---|---|---|
| OEM | Lam Research | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research OnTrak Synergy Post | Lapmaster 120 Continuous |
| Specifications | ||
| Configuration | With Hepa Mini-Environment[1] | — |
| Tool Type | Post-CMP cleaner[2] | — |
| Wafer Size | 8 inch (200 mm)[3] | — |
| HEPA Mini-Environment | Included[3] | — |