Waferpedia

Comparison ledger

Simba2versusSuperSweep64

Temescal Simba2, Temescal SuperSweep64, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Simba2Temescal
SuperSweep64Temescal
OEMTemescalTemescal
CategoryDepositionDeposition
Wafer size150mm150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2005 Third-party support only
Control system——
Generation——
FamilyTemescal Simba2Temescal SuperSweep64
Specifications
Power supply15-kW Temescal Simba2[1]—
System associationListed as an upgrade option for FC-4400[1]—
Power rating15 kW[4]—
Product typePower supply[5]—
FunctionE-beam power supply[6]—
Associated systemsFC-4400, UEFC-5700, FC/BCD-2800[7]—
ManufacturerTemescal[5]—
controller type—programmable beam sweep controller[1]
system association—listed under the FC-4400 system's electron beam source, power supply, and sweep section[1]
wafer capacity referenced in associated system—30 150 mm wafers per load[1]
Type—programmable beam sweep controller[1]
Operation—fully digital operation[8]
Internal waveform storage—up to 64 patterns[8]
Addressable points—1024[8]
Waveform types—sine, triangle, saw-tooth, clipped, and arbitrary[8]
Frequency range—1 to 200 Hz[8]
Max. sweep current—-4 A to +4 A[8]
Power requirements—100–240 V ac, 50–60 Hz[8]
Computer I/O ports—RS-232 and RS-485[8]
Compatible system—Temescal FC-4400 deposition system[9]
Compatibility—Compatible with almost any commercially available e-beam gun[10]
Waveform resolution—8 bits (0.4%)[10]
Weight—10 lbs[10]

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Sources (10)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org
  4. [4]waferpedia.comwaferpedia.com
  5. [5]semi-sps.comsemi-sps.com
  6. [6]semi-sps.comsemi-sps.com
  7. [7]waferpedia.comwaferpedia.com
  8. [8]e-beam.ferrotec.come-beam.ferrotec.com
  9. [9]waferpedia.comwaferpedia.com
  10. [10]e-beam.ferrotec.come-beam.ferrotec.com