Temescal
SuperSweep64
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Temescal SuperSweep64 is a fully digital beam sweep controller. The Temescal SuperSweep64 stores up to 64 user-defined sweep patterns. The Temescal SuperSweep64 addresses 1024 discrete points.[1][2]
What it is
General reference — not yet source-verifiedThe Temescal SuperSweep64 is a programmable beam sweep controller for an electron beam source used in deposition systems.
How it works
The Temescal SuperSweep64 offers fully digital operation, internal storage for up to sixty-four user-defined sweep patterns, and compatibility with almost any commercially available e-beam gun.[2][1]
The Temescal SuperSweep64 can address, dwell at, or avoid any of one thousand twenty-four discrete points.[2][1]
Where it fits in the process flow
Applications
The Temescal SuperSweep64 is used in e-beam physical vapor deposition processes.[2][1]
The Temescal SuperSweep64 is compatible with deposition systems configured for lift-off oriented evaporation and wafer metallization.[4][6]
- lift-off oriented evaporation
- metallization
What do the numbers mean?
Power & electrical3
- system association
- listed under the FC-4400 system's electron beam source, power supply, and sweep section[4]
Wafer handling1
Optics & imaging1
Control & software3
Dimensions & facilities1
Configuration & options9
Vintage & configurations
- 2005-09-08Third-party support only[3]
Instruction manual addendum is dated September 8, 2005.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SuperSweep64 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the SuperSweep64 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SuperSweep64 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SuperSweep64 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SuperSweep64 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SuperSweep64 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
- [2]e-beam.ferrotec.com — e-beam.ferrotec.come-beam.ferrotec.com
- [3]apintegration.com — apintegration.comapintegration.com
- [4]web.archive.org — web.archive.orgweb.archive.org
- [5]waferpedia.comwaferpedia.com
- [6]Temescal UEFC-5700 Deposition System — web.archive.orgweb.archive.org
- [7]Temescal FC/BCD-2800 Deposition System — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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