Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian Viision 80 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Viision 80 IonVarian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian Viision 80 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Platen ADV-S Type[2] | 5 Wire[4] |
| Type | ESC Platen ADV-S Type[2] | High Current[1] |
| Category | Ion Implantation[3] | — |
| Phase | — | 3 Phase[4] |
| Voltage | — | 208 V[1] |
| Power | — | 35 kVA[1] |
| Electrical phase | — | 3 Phase[4] |
| Electrical wires | — | 5 Wire[4] |
| Voltage range | — | 200-230 Vac[5] |
| Frequency | — | 50/60 Hz[4] |
| Maximum current | — | 50 A[1] |
| Full load current | — | 95 Amps[1] |
| High current | — | Yes[1] |
| Wiring | — | 5 Wire[4] |
| Current | — | 95 Amps[1] |
| Max Current | — | 50 A[1] |
| OEM | — | Varian[4] |
| Model | — | Viision 80[4] |
| Equipment type | — | Ion Implanter[4] |
| Electrical configuration | — | 3 Phase - 5 Wire - 208 Volts - 50/60 Hz[4] |
| Vintage | — | 1997[4] |
| Current class | — | High Current[1] |
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