Waferpedia

Tool family

Espec EHS-412(M)

The Espec EHS-412(M) is a large highly accelerated stress test system for semiconductor testing. The EHS-412(M) operates at +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).

Models in this family

  1. The Espec EHS-412(M) is a large highly accelerated stress test system for semiconductor testing. The EHS-412(M) operates at +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).

    Cited variants

    DesignationGenerationVintageChangesSource
    EHS-212(M)——Lower temperature, humidity, and pressure range than EHS-412(M), with interior dimensions φ294×L318mm.espec.co.jp[1]
    EHS-212MD——Two-stage version with interior dimensions φ294×L318mm ×2stage.espec.co.jp[1]
    EHS-222(M)——Different chamber size, with interior dimensions φ394×L426mm.espec.co.jp[1]
    EHS-222MD——Two-stage version with interior dimensions φ394×L426mm ×2stage.espec.co.jp[1]
    EHS-222M-L——Longer chamber with interior dimensions φ394×L626mm.espec.co.jp[1]
    EHS-412MD——Two-stage version with interior dimensions φ294×L318mm ×2stage.espec.co.jp[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp