Tool family
The KLA Candela CS 10 R / CS 10 V is a wafer inspection system.
The KLA Candela CS 10 R Wafer Inspector is a single-phase wafer inspector with a 50/60 Hz, 5 A power specification and a booting upgrade requirement.
The KLA Candela CS 10 is a surface inspection system with source-stated examples from 2005 and 2007 vintages.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Candela CS10/CS20 | — | — | The source groups CS10 and CS20 as related models and states manual operation for CS10 and automated transport for CS20. | instrumenthive.com[1] |
The KLA Candela CS 10 V Wafer Inspector is a metrology and inspection tool.
The KLA Candela CS 10 R / CS 10 V is a wafer inspection system.
The KLA Candela CS 10 R Wafer Inspector is a single-phase wafer inspector with a 50/60 Hz, 5 A power specification and a booting upgrade requirement.
The KLA Candela CS 10 is a surface inspection system with source-stated examples from 2005 and 2007 vintages.
The KLA Candela CS 10 V Wafer Inspector is a metrology and inspection tool.