Tool family
The KLA RS 55 Auto Resistivity Mapper is a KLA-Tencor Prometrix RS55/TC four-point probe resistivity mapping system for wafers up to 8 inches/200 mm with manual wafer handling.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| RS55/TC | — | — | Temperature compensation configuration that can compensate sheet resistance measurements against ambient temperature and materials. | tech-semi.com[1] |