KLA
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The KLA RS 55 Auto Resistivity Mapper is a four-point probe resistivity mapping system. The KLA RS 55 Auto Resistivity Mapper supports up to 8"/200mm wafers. The KLA RS 55 Auto Resistivity Mapper provides contour maps, 3-D plots, and diameter scans.[1]
The KLA RS 55 is an automatic resistivity mapper used to characterize the electrical resistivity of semiconductor wafers. The system is also known under the designation KLA-Tencor Prometrix RS-55. The RS55/TC configuration of the instrument adds temperature compensation for the sheet resistance measurements. The system handles wafers up to 8"/200mm in diameter. Wafer handling is manual.[3][1][2]
The RS 55 measures surface resistivity using a four-point probe measurement head. The instrument generates output in the form of contour maps, three-dimensional plots and diameter scans. In the RS55/TC configuration, the system can compensate sheet resistance measurements against ambient temperature and the material under test. The calibrated measurement range, traceable to NIST standards, spans from 0.005Ω to 5MΩ. The system runs Omni-Map software, revision 6.51, together with a StatTrax data module.[1][2]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| RS55/TC | — | — | Temperature compensation configuration that can compensate sheet resistance measurements against ambient temperature and materials. | tech-semi.com[1] |
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The RS55 is a four point probe resistivity mapping system.[1]
The RS55 provides contour maps, three-dimensional plots, and diameter scans.[1]
The RS55/TC configuration includes temperature compensation for sheet resistance measurements against ambient temperature and materials.[1]
The following facts about the RS 55 Auto Resistivity Mapper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RS 55 Auto Resistivity Mapper are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the RS 55 Auto Resistivity Mapper are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RS 55 Auto Resistivity Mapper are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RS 55 Auto Resistivity Mapper is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the RS 55 Auto Resistivity Mapper are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 7, 2026.
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