Waferpedia

Tool family

Mattson Steag

MattsonThermal / Diffusion2 entries
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Models in this family

  1. Steag / AST 2800 RTP

    The Mattson / Steag / AST 2800 RTP System is a Rapid Thermal Process system.

  2. Steag / AST Heatpulse 610 RTP

    The Mattson Steag / AST Heatpulse 610 RTP is a rapid thermal process (RTP) system for 6-inch wafers with a temperature range of 400-1250 °C.

All entries

  1. Steag / AST 2800 RTPMattson

    The Mattson / Steag / AST 2800 RTP System is a Rapid Thermal Process system.

    CategoryThermal / Diffusion
    8 specs
  2. Steag / AST Heatpulse 610 RTPMattson

    The Mattson Steag / AST Heatpulse 610 RTP is a rapid thermal process (RTP) system for 6-inch wafers with a temperature range of 400-1250 °C.

    CategoryThermal / Diffusion
    1 spec