Mattson
Steag / AST Heatpulse 610 RTP
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Mattson Steag / AST Heatpulse 610 RTP is a rapid thermal process system. The Mattson Steag / AST Heatpulse 610 RTP processes 6-inch wafers. The Mattson Steag / AST Heatpulse 610 RTP has a temperature range of 400-1250 °C.[1][2]
What it is
The Mattson Steag / AST Heatpulse 610 is a rapid thermal processing (RTP) system designed for six-inch wafers. The system has a temperature range of 400 to 1250 degrees Celsius.[1][2]
How it works
General reference — not yet source-verifiedRTP systems use banks of high-intensity lamps, typically halogen lamps, to heat the wafer from above and below. The wafer is placed on a quartz tray or pins inside a cold-wall chamber, and a pyrometer or thermocouple measures the wafer temperature to provide closed-loop control of the lamp power, allowing fast ramp-up and cool-down rates.
Applications
General reference — not yet source-verifiedCommon applications of RTP include source/drain and gate dielectric annealing, nickel silicide formation, rapid thermal oxidation, and rapid thermal nitridation. The Heatpulse class of tools is deployed in CMOS and memory device manufacturing for front-end and back-end thermal processing.
What do the numbers mean?
Configuration & options1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Steag / AST Heatpulse 610 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Steag / AST Heatpulse 610 RTP are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Steag / AST Heatpulse 610 RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Steag / AST Heatpulse 610 RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Steag / AST Heatpulse 610 RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Steag / AST Heatpulse 610 RTP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Steag / AST Heatpulse 610 RTP — Mattson | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 7, 2026.
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