Tokyo Electron TE 8500

Models in this family

1. TE 8500

   The Tokyo Electron TE 8500 is an etch system available in multiple variants, including a dry etching system for 6-inch wafers and a dry etcher with one chamber for oxide etch with endpoint capability.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   TE 8500 P Dry	—	—	Dry etching system for 6-inch wafers.	waferpedia.com[1]
   TE 8500 PESC Dry	—	—	Dry etcher with one chamber for oxide etch with endpoint capability.	waferpedia.com[1]

2. TE 8500 P Dry

   The Tokyo Electron TE 8500 P is a dry etching system for 6-inch wafers.

3. TE 8500 PESC Dry

   The Tokyo Electron TE 8500 PESC Dry is a dry etcher with one chamber for oxide etch with endpoint capability.

Sources