Waferpedia

Tool family

Zeiss Supra 55

Models in this family

  1. The Zeiss Supra 55 is a field-emission scanning electron microscope (FE-SEM) that operates at accelerating voltages from 0.1 to 30 kV and achieves an imaging resolution down to 1.0 nm.

    Cited variants

    DesignationGenerationVintageChangesSource
    Supra 55 VP——Variable-pressure version; sources state high-vacuum and VP modes, with a load-lock system on one source and VP capability up to 1.33 mbar on another.bu.edu[1]
    Supra 55 FESEM——Described as a FESEM with a Schottky thermal field emission source.cmdis.rpi.edu[2]
  2. The Zeiss Supra 55 VP is a variable-pressure scanning electron microscope with TFE source type, Windows 10, and SmartSEM v6.

All entries

  1. Supra 55Zeiss

    The Zeiss Supra 55 is a field-emission scanning electron microscope (FE-SEM) that operates at accelerating voltages from 0.1 to 30 kV and achieves an imaging resolution down to 1.0 nm.

    CategoryMetrology & Inspection
    47 specs
  2. Supra 55 VPZeiss

    The Zeiss Supra 55 VP is a variable-pressure scanning electron microscope with TFE source type, Windows 10, and SmartSEM v6.

    CategoryMetrology & Inspection
    24 specs

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]bu.edubu.edu
  2. [2]cmdis.rpi.educmdis.rpi.edu