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Zeiss

Supra 55

Metrology & InspectionZeiss Supra 55 family
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The Zeiss Supra 55 is a field-emission scanning electron microscope (FE-SEM) that uses a Schottky thermal field emission source to achieve high-resolution imaging. The Supra 55 provides an ultimate imaging resolution in the range of 2 nm and an accelerating voltage range of 0.2 to 30 kV.[1][2]

Supra 55 — Inventory photo
Fig. 01Supra 55Inventory photo[3]

  • Plate 01Zeiss Supra 55 Training Video Part 1 Review

    David FreyWatch on YouTube

Power

0.2 to 30 kV[2]

Vacuum

Adixen rough pump (for airlock)[3]

Optics

Detectors:[3]

What it is

The Zeiss Supra 55 is a scanning electron microscope used for metrology and inspection. The Zeiss Supra 55 belongs to the field-emission SEM class and is used for high-resolution surface imaging and characterization.[1][2][4][5]

How it works

The Zeiss Supra 55 uses multiple detectors for secondary-electron and backscatter signals. The Zeiss Supra 55 can also support cathodoluminescence detection and electron-beam-lithography-related use when configured for those functions.[2][1]

The Zeiss Supra 55 VP operates in high vacuum and variable-pressure modes. The Zeiss Supra 55 VP includes a load-lock system for specimen exchange without venting the main chamber.[4][5]

Where it fits in the process flow

The Zeiss Supra 55 is used alongside analytical methods when elemental or contrast information is needed. The Zeiss Supra 55 can support electron-beam-lithography-related work in facilities that configure it for that use.[1][2][4][5]

Applications

The Zeiss Supra 55 is used for high-resolution imaging of surface topography. The Zeiss Supra 55 is used for secondary-electron imaging, backscatter imaging, and composition-sensitive contrast when fitted with the relevant detectors.[2][1]

The Zeiss Supra 55 is used for materials characterization. The Zeiss Supra 55 is also used for nanomanipulation and force measurement in setups that include those accessories.[2]

The Zeiss Supra 55 VP is used for samples with a wide range of conductivity. The Zeiss Supra 55 VP is used for solid-sample compositional analysis when equipped with energy-dispersive spectroscopy.[5][4]

What do the numbers mean?

Power & electrical3

Accelerating Voltage
0.2 to 30 kV[2]
Accurate?
Accelerating Voltage (VP variant)
0.1 to 30 kV[4]
Accurate?
Acceleration voltage
0.1 - 30 kV[4]
Accurate?

Vacuum & pumping10

Adixen rough pump (for airlock)[3]
Accurate?
Edwards RV12 Oil Rough pump (Chamber)[3]
Accurate?
Imaging Resolution (High Vacuum, 15 kV)
1.0 nm[4]
Accurate?
Imaging Resolution (High Vacuum, 1 kV)
1.7 nm[4]
Accurate?
Imaging Resolution (High Vacuum, 0.2 kV)
3.5 nm[4]
Accurate?
Variable Pressure Range
2 to 133 Pa, adjustable in steps of 1 Pa[4]
Accurate?
Pumps
Adixen rough pump (airlock), Edwards RV12 oil rough pump (chamber)[3]
Accurate?
Variable pressure range
2 - 133 Pa, adjustable in steps of 1 Pa[4]
Accurate?
Accessory
Adixen rough pump (for airlock)[3]
Accurate?
Accessory
Edwards RV12 Oil Rough pump (Chamber)[3]
Accurate?

Optics & imaging9

Detectors:[3]
Accurate?
Detectors[3]
Accurate?
Imaging Resolution (VP mode, 30 kV)
2.0 nm[4]
Accurate?
Resolution (general range)
2 nm[1]
Accurate?
Magnification Range
12 - 900,000x[4]
Accurate?
Detectors
InLens SE, E-T (SE2), AsB (backscattered), CL (cathodoluminescence), STEM, EDS, EBSD[3]
Accurate?
Electron image resolution
1.0 nm (@ 15 kV), 1.7 nm (@ 1 kV), 3.5 nm (@ 0.2 kV), 2.0 nm (@ 30 kV in VP mode)[4]
Accurate?
Magnification
12 - 900,000x[4]
Accurate?
Detectors
InLens, SE, 4QBS, STEM, CCD PC[3]
Accurate?

Control & software2

PC[3]
Accurate?
Operating System
Windows 7 32-bit with Smartsem v5.05[3]
Accurate?

Configuration & options23

InLens[3]
Accurate?
4QBS[3]
Accurate?
STEM[3]
Accurate?
CCD[3]
Accurate?
Win7 32bit[3]
Accurate?
Smartsem v5.05[3]
Accurate?
Accessory[3]
Accurate?
FJELD Airlock[3]
Accurate?
ATC Chiller[3]
Accurate?
EDAX ELECT SUPER 70mm2E[3]
Accurate?
Electron Source Type
Schottky thermal field emission source (FESEM)[1]
Accurate?
Probe Current
4 pA to 10 nA (20 nA optional)[4]
Accurate?
Sample Stage
5-Axes (X, Y, Z, R, T) Motorized Cartesian[4]
Accurate?
Load-Lock System
FJELD Airlock[3]
Accurate?
Chiller
ATC Chiller[3]
Accurate?
Model
Supra 55[3]
Accurate?
Equipment type
Scanning Electron Microscope (SEM)[3]
Accurate?
Source type
FESEM[1]
Accurate?
Electron source
Schottky thermal field emission source[1]
Accurate?
Probe current
4 pA - 10 nA (20 nA optional)[4]
Accurate?
Accessory
FJELD Airlock[3]
Accurate?
Accessory
ATC Chiller[3]
Accurate?
Accessory
EDAX ELECT SUPER 70mm2E[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Supra 55 VP——Variable-pressure version; sources state high-vacuum and VP modes, with a load-lock system on one source and VP capability up to 1.33 mbar on another.bu.edu[5]
Supra 55 FESEM——Described as a FESEM with a Schottky thermal field emission source.cmdis.rpi.edu[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationAdixen rough pump (for airlock)[3]
  • ConfigurationEdwards RV12 Oil Rough pump (Chamber)[3]
  • Accelerating Voltage0.2 to 30 kV[2]
  • Accelerating Voltage (VP variant)0.1 to 30 kV[4]
  • Imaging Resolution (High Vacuum, 15 kV)1.0 nm[4]
  • Imaging Resolution (High Vacuum, 1 kV)1.7 nm[4]
  • Imaging Resolution (High Vacuum, 0.2 kV)3.5 nm[4]
  • Variable Pressure Range2 to 133 Pa, adjustable in steps of 1 Pa[4]
  • PumpsAdixen rough pump (airlock), Edwards RV12 oil rough pump (chamber)[3]
  • Variable pressure range2 - 133 Pa, adjustable in steps of 1 Pa[4]
  • Acceleration voltage0.1 - 30 kV[4]
  • AccessoryAdixen rough pump (for airlock)[3]
  • AccessoryEdwards RV12 Oil Rough pump (Chamber)[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of microscope is the Zeiss Supra 55?

The Zeiss Supra 55 is a field-emission scanning electron microscope.[4][5]

Does the Zeiss Supra 55 support variable pressure operation?

The Zeiss Supra 55 VP operates in both high vacuum pressure and variable pressure modes.[4]

Not publicly documented

The following facts about the Supra 55 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Supra 55 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Supra 55 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Supra 55 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Supra 55 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Supra 55 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]cmdis.rpi.edu — cmdis.rpi.educmdis.rpi.edu
  2. [2]weizmann.ac.il — weizmann.ac.ilweizmann.ac.il
  3. [3]Inventory photo
  4. [4]binghamton.edu — binghamton.edubinghamton.edu
  5. [5]bu.edu — bu.edubu.edu
  6. [6]BEEM: Zeiss Supra 55 VP — tuhh.detuhh.de
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Last updated Oct 10, 2026.

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