AJA

ATC 2036 E

Deposition 15-20” adjustable length from source to wafer AJA ATC family

Research Quality: 30% complete

LinkedIn X Email

ATC 2036 E — Inventory photo — Fig. 01ATC 2036 EInventory photo^[1]

Wafer size

15-20” adjustable length from source to wafer

Vacuum

Vacuum Gauge Package with Cables^[1]

What is it?

The AJA ATC 2036 E is an evaporator with a 15-20 inch adjustable source-to-wafer length.

What do the numbers mean?

Vacuum & pumping6

Vacuum Gauge Package with Cables^[1]

Accurate?

Pressure Control/ Vacuum Valves^[1]

Accurate?

Power Distribution / Pump Control^[1]

Accurate?

S/S vacuum chamber^[1]

Accurate?

Cryo pump / Isolation valve (10" CF)^[1]

Accurate?

Vacuum gaugue (2.75")^[1]

Accurate?

Wafer handling4

Wafer size: 15-20” adjustable length from source to wafer^[1]; Water Cooled Substrate Holder^[1]; Substrate holder (12' CF)^[1]; (2) 6" CF viewpoint with integrated shutters and minor for crucible viewing & load-lock transfer^[1]

Control & software1

Quartz Crystal Deposition Controller^[1]

Accurate?

Dimensions & facilities1

Nominal 36" high x 20" depth x 20" wide^[1]

Accurate?

Configuration & options8

Temescal Multu-Pocket Rotary E-Beam Source^[1]; Load-Lock^[1]; Pneumatic Controls^[1]; Main Deposition Chamber:^[1]; Flat front^[1]
Chamber Front: Double hinged door with locking mechanism^[1]; Ports on Chamber Body for Following Components:^[1]; Load-lock (10" CF)^[1]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationVacuum Gauge Package with Cables^[1]
ConfigurationPressure Control/ Vacuum Valves^[1]
ConfigurationPower Distribution / Pump Control^[1]
ConfigurationS/S vacuum chamber^[1]
ConfigurationCryo pump / Isolation valve (10" CF)^[1]
ConfigurationVacuum gaugue (2.75")^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the ATC 2036 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATC 2036 E are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATC 2036 E are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATC 2036 E are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATC 2036 E are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATC 2036 E is not on record.
Answerable by: an OEM datasheet or a fab qualification report