AJA

NT-80

Research Quality: 60% complete

What it is

The AJA NT-80 is a Nautilus Series rotating magnetron used for sputter deposition. The NT-80 is a source rather than a complete coating system.^[1]^[2]^[3]

How it works

The NT-80 has been used with segmented, multi-material targets on spinning substrates for direct, variable co-deposition from a single magnetron. The power supply output is synchronized to change power for each segment being sputtered.^[2]^[3]

Applications

The NT-80 is used for sputter deposition onto spinning substrates. The NT-80 is also used for direct, variable co-depositions from a single magnetron with segmented, multi-material targets.^[2]^[3]

co-deposition on spinning substrates
segmented, multi-material target deposition

What do the numbers mean?

Wafer handling2

co-deposition use: used with segmented, multi-material targets depositing onto spinning substrates for direct, variable co-depositions from a single magnetron^[2]
Application capability: Used with segmented, multi-material targets depositing onto spinning substrates for co-deposition tests^[1]

Performance2

optimization capability: optimize target utilization, uniformity, or intentional non-uniformity^[1]
Configurable magnet array: Allows optimization of target utilization, uniformity, or intentional non-uniformity^[1]

Configuration & options3

series: Nautilus Series Rotating Magnetron^[1]
magnet array: configurable magnet array^[1]
Type: Nautilus Series Rotating Magnetron^[1]

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Where are the manuals?

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Not publicly documented

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Frequently asked questions

What type of source is the AJA NT-80?

The AJA NT-80 is a Nautilus Series rotating magnetron used for sputter deposition.^[1]^[2]^[3]

What can the NT-80 be tuned to optimize?

The NT-80 can be tuned to optimize target utilization, uniformity, or intentional non-uniformity.^[1]^[2]^[3]

Can the NT-80 support co-deposition?

The NT-80 has been used with segmented, multi-material targets to perform direct, variable co-depositions from a single magnetron.^[2]^[3]

Not publicly documented

The following facts about the NT-80 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NT-80 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NT-80 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NT-80 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NT-80 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NT-80 is not on record.
Answerable by: an OEM datasheet or a fab qualification report