Waferpedia

Bruker

Dektak 3030

Bruker Dektak 3030 family
Research Quality: 10% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

BrukerDektak 3030
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What is it?

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Optics & imaging3

Vertical resolution
1A/65KA, 20A/1,310KA[2]
Accurate?
Zoom magnification
60X to 420X[2]
Accurate?
Motorized zoom camera
Solid state monochrome image[2]
Accurate?

Control & software1

Software leveling
2-point programmable or cursor leveling[2]
Accurate?

Configuration & options9

Manufacturer
Bruker / Veeco[1]
Accurate?
Model
Dektak 3030[1]
Accurate?
Vertical range
100 angstroms(A) to 1,310KA[2]
Accurate?
Scan length range
50 microns to 50mm[2]
Accurate?
Scan speed ranges
Low, medium, high[2]
Accurate?
Stage leveling
Manual[2]
Accurate?
Stylus force
1mg to 40mg[2]
Accurate?
Maximum sample thickness
45mm(1.5")[2]
Accurate?
Sample stage diameter
165mm[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model designation?

Bruker Dektak 3030.[1]

Not publicly documented

The following facts about the Dektak 3030 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak 3030 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Dektak 3030 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Dektak 3030 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Dektak 3030 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Dektak 3030 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]culverequipment.comculverequipment.com
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Last updated Oct 6, 2026.

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