Bruker

Dektak 8

Metrology & Inspection Bruker Dektak family

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BrukerDektak 8

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What it is

The Dektak 8 is manufactured by Bruker (formerly Veeco). The instrument measures vertical steps from tens of nanometers to 1 millimeter in depth. Scan lengths of up to 50 millimeters can be performed, and the system accepts samples as large as 8-inch wafers.^[1]^[3]^[2]

Applications

General reference — not yet source-verified

Applications of the Dektak 8 include measuring thin‑film stress through substrate curvature, characterizing surface roughness after polishing, and verifying step coverage in interconnect structures. The instrument is also used in MEMS device fabrication, optical lens manufacturing, and general materials research that requires precise surface profile measurements.

What do the numbers mean?

Configuration & options5

Chambers (2)^[1]
Type: Contact profilometer^[2]
Vertical step range: Tens of nanometers to 1 mm^[2]
Maximum scan length: 50 mm^[2]
Maximum sample size: 8 inches^[2]

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Not publicly documented

Field notes

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Frequently asked questions

What type of profilometer is the Dektak 8?

The Dektak 8 is a contact profilometer.^[2]

What vertical measurement range does the Dektak 8 support?

The Dektak 8 measures vertical steps from tens of nanometers to 1 millimeter in depth.^[2]

What is the maximum scan length of the Dektak 8?

The maximum scan length is 50 millimeters.^[2]

What is the largest sample size the Dektak 8 can accommodate?

The Dektak 8 can accept samples as large as 8-inch wafers.^[2]

Who manufactures the Dektak 8?

The Dektak 8 is manufactured by Bruker (formerly Veeco).^[1]^[3]

Not publicly documented

The following facts about the Dektak 8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak 8 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dektak 8 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dektak 8 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dektak 8 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dektak 8 is not on record.
Answerable by: an OEM datasheet or a fab qualification report