Bruker
Dimension 3100
What it is
How it works
General reference — not yet source-verifiedAn AFM operates by raster-scanning a sharp tip mounted on a flexible cantilever across the sample surface while a feedback loop maintains constant tip-sample interaction, typically constant force in contact mode or constant oscillation amplitude in tapping mode.
The deflection of the cantilever is measured using a laser beam reflected off the cantilever onto a photodetector, producing a three-dimensional topographic map of the surface.
Where it fits in the process flow
General reference — not yet source-verifiedAtomic force microscopes are used in semiconductor fabrication for offline or inline metrology, providing high-resolution measurements of surface roughness, step heights, line widths, and other topographical features at the nanoscale.
Applications
The Dimension 3100 supports multiple imaging modes including conductive AFM (CAFM) and extended tunneling AFM (TUNA) through dedicated application modules.[2]
What do the numbers mean?
Vacuum & pumping1
- Associated MasterFlex L/S Peristaltic Pump[2]
Wafer handling2
Control & software10
Dimensions & facilities2
- 3 Dimension Series AFM Heads (Standard Open Loop XYZ, Closed Loop XY / Open Loop Z and Hybrid Closed Loop XYZ)[2]
Configuration & options22
- Comes with all necessary components[2]
- Including:[2]
- NanoScope Analysis V 1.5[2]
- Dual 22" Dell Flatscreen Monitors[2]
- Digital instruments Trackball[2]
- Keyboard & Mouse[2]
- TMC Gimbal Piston Pneumatic Vibration Isolation Table and Acoustic Enclosure / Hood[2]
- Probe Mounting Block[2]
- Variety of Probe Holders and Fluid Splash Guards (inquire for more details)[2]
- CAFM and Extended TUNA Application Modules[2]
- Several Boxes of Harmonix AFM probes[2]
- Variety of Miscellaneous Spare Cables[2]
- Hardware Parts[2]
- Vibration Isolation
- TMC Gimbal Piston Pneumatic Vibration Isolation Table with Acoustic Enclosure[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationAssociated MasterFlex L/S Peristaltic Pump[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Dimension 3100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dimension 3100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dimension 3100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dimension 3100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dimension 3100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dimension 3100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Equipment inventory listing
- [7]Facilities | Center for Materials, Devices, and Integrated Systems — cmdis.rpi.educmdis.rpi.edu
Last updated Oct 3, 2026.
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