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Disco

DFG 8560

Dicing & GrindingDisco DFG family
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DFG 8560 — Inventory photo
Fig. 01DFG 8560Inventory photo[1]

What it is

The Disco DFG 8560 is a grinder used in semiconductor manufacturing.[1][2]

The DFG 8560 is a DISCO grinder model in the grinder product family.[6]

How it works

The DFG 8560 has three phases, an air-bearing spindle, and water-cooled external cooling.[1]

Where it fits in the process flow

General reference — not yet source-verified

A grinder sits in the wafer back-end process flow after front-side device formation when wafer thinning or backside preparation is needed. A grinder often supports later singulation or packaging steps by bringing the wafer to a target thickness and condition.

What do the numbers mean?

Power & electrical9

Phase
3 Phase[1]
Accurate?
Voltage
200V[1]
Accurate?
50/60 Hz[1]
Accurate?
Voltage
200 VAC[2]
Accurate?
Frequency
50 / 60 Hz[2]
Accurate?
Full Load Amps
57 A[2]
Accurate?
Spindle power (Z1-Z3)
4.8 kW[6]
Accurate?
Full load amperage
57 A[1]
Accurate?
Power
200 VAC, 3 phase, 50/60 Hz, 57 A[2]
Accurate?

Dimensions & facilities3

External Cooling
Water Cooled[1]
Accurate?
Dimensions (WxDxH)
1,400 x 3,322 x 1,800 mm[6]
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Weight
approx. 4,000 kg[6]
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Configuration & options22

3 Wire + 2 Ground[1]
Accurate?
57A[1]
Accurate?
Disco DTU 152 Chiller[1]
Accurate?
Spindle Type
Air Bearings[1]
Accurate?
Maximum workpiece size
300 mm[6]
Accurate?
Number of spindles
2[6]
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Spindle speed (Z1-Z3)
1,000 - 4,000 min⁻¹[6]
Accurate?
Number of work tables
3[6]
Accurate?
Machine type
Grinder[1]
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Phase
3[2]
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Wiring
3 Wire + 2 Ground[1]
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Chiller
Disco DTU 152[1]
Accurate?
OEM
Disco[1]
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Model
DFG 8560[1]
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Category
Dicing & Grinding[6]
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Maximum workpiece size
ø200 mm[6]
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Automation
Fully automatic[6]
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Spindle count
2[6]
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Spindle speed (Z1-Z3)
1,000 - 4,000 min-1[6]
Accurate?
Work table count
3[6]
Accurate?
Chiller
Disco DTU 152 Chiller[1]
Accurate?
Vintage
2011[1]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Voltage200V[1]
  • Configuration50/60 Hz[1]
  • Voltage200 VAC[2]
  • Frequency50 / 60 Hz[2]
  • Full Load Amps57 A[2]
  • Spindle power (Z1-Z3)4.8 kW[6]
  • Full load amperage57 A[1]
  • Power200 VAC, 3 phase, 50/60 Hz, 57 A[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What electrical supply does the Disco DFG 8560 require?

The DFG 8560 requires 200 VAC, three-phase, 50/60 Hz power with a full-load amperage of 57 A.[1][2]

Not publicly documented

The following facts about the DFG 8560 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFG 8560 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFG 8560 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFG 8560 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFG 8560 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFG 8560 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]web.archive.org — disco.co.jp (Feb 22, 2020)web.archive.org
  7. [7]Equipment inventory listing
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Last updated Oct 4, 2026.

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