Waferpedia

EV Group

IQA 0048 Mask

LithographyEV Group IQA 0048 Mask family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

EV GroupIQA 0048 Mask
No photo available yet

What it is

The EVG IQA 0048 is a mask aligner manufactured by EV Group.[1]

How it works

General reference — not yet source-verified

The tool typically includes a top-side microscope for viewing alignment marks, a substrate chuck, and a mask holder. Exposure dose and alignment accuracy are controlled to meet process requirements.

Applications

General reference — not yet source-verified

The tool supports a variety of substrate sizes and materials, including silicon, glass, and compound semiconductors.

What do the numbers mean?

Optics & imaging1

Equipment type
Mask Aligner[1]
Accurate?

Configuration & options3

OEM
EVG[1]
Accurate?
Model
IQA 0048[1]
Accurate?
Vintage
2012[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Not publicly documented

The following facts about the IQA 0048 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IQA 0048 Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IQA 0048 Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IQA 0048 Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IQA 0048 Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IQA 0048 Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
Was this page accurate?

Last updated Oct 4, 2026.

Compare with similar tools

View all →