Filmetrics

F20

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The Filmetrics F20 is an optical reflectometer that measures film thickness using spectral reflectance. The F20 is a general-purpose instrument suitable for dielectrics, semiconductors, and thin metals. An extended-range version, the Filmetrics F20-EXR, operates over 400–1700 nm for measuring ITO and other transparent conductive oxides.^[1]^[2]^[3]

FilmetricsF20

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Plate 01How to Measure Film Thickness using the Filmetrics® F20 Thin-Film Analyzer
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Plate 02F20 Hardware Installation
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Plate 03Filmetrics F20 Thin Film Measuring System #61634
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Plate 04How to Set Up the Filmetrics® F20 Thin-Film Analyzer
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Plate 05Filmetrics F20 System
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Plate 06How to Change the Lamp on the Filmetrics® F20 Thin-Film Analyzer
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What it is

The Filmetrics F20 is an optical reflectometer used for film thickness measurement. The F20 is used for dielectric films, semiconductors, and thin metals.^[1]^[2]

How it works

The F20 is used for transparent thin films and for films whose optical response can be modeled from reflected light. The same class of measurement is used to determine thickness and, in some applications, refractive index and extinction coefficient from spectral reflectance data.^[2]^[3]

Where it fits in the process flow

The F20 sits in post-deposition characterization rather than in patterning or film growth. The instrument is used after thin-film formation to verify thickness on dielectrics, semiconductors, and thin metals.^[1]^[2]

Applications

The F20 is used to measure film thickness on dielectrics, semiconductors, and thin metals. The instrument is also used for transparent thin films.^[1]^[2]

The broader Filmetrics family is used for process films, refractive index and extinction coefficient measurement, metal films, and ITO and other transparent conductive oxides. The family is also used for applications that include display layers, OLED layers, medical devices, and microfluidics.^[3]

film thickness measurement
measurement of dielectrics
measurement of semiconductors
measurement of thin metals
semiconductor teaching labs

What do the numbers mean?

Optics & imaging6

Measurement technique: reflectance / optical reflectometry^[1]
Optical model: multilayer optical models^[1]
Wavelength range (F20-EXR variant mentioned in source): 400-1700 nm^[3]
Technique: Optical reflectometry (spectral reflectance)^[2]
Analysis: Multilayer optical models^[1]
Wavelength range (F20-EXR variant): 400–1700 nm^[3]

Configuration & options7

Primary measurement: film thickness^[1]
Materials measured: dielectrics, semiconductors, and thin metals^[1]
Spot size: large spot^[1]
General use description: general purpose film-measurement instrument^[3]
Measurement: Film thickness and refractive index (n & k)^[1]
Beam size (ASU configuration): Large spot^[1]
Beam size (Utah configuration): Small spot^[4]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
F20-EXR	—	—	Uses spectral reflectance for ITO measurements and is described as having a wide 400-1700nm wavelength range for one-click analysis of ITO thickness.	web.archive.org^[3]
F40	—	—	Described as a Filmetrics optical reflectometer with a small spot for local areas, compared with the F20's large spot.	cores.research.asu.edu^[1]

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What replaced it?

siblingFilmetrics F40— Listed alongside the F20 as an optical reflectometer; the F40 is described as a small-spot tool for local areas, while the F20 is general purpose.source^[1]
siblingFilmetrics F10-HC— The F10-HC is based on the F20 platform.source^[5]
siblingFilmetrics F37— Listed on the same products overview navigation as related Filmetrics models.source^[6]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What does the Filmetrics F20 measure?

The Filmetrics F20 measures film thickness. The instrument is used for dielectrics, semiconductors, and thin metals.^[1]^[2]

What metrology method does the F20 use?

The F20 uses optical reflectometry.^[1]^[2]

Not publicly documented

The following facts about the F20 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F20 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the F20 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F20 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F20 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the F20 are on record.
Answerable by: an OEM parts catalog or a service engineer