Hitachi
Kokusai VR 120 S Resistivity
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi Kokusai VR 120 S Resistivity Test & Probe is a test and probe instrument for measuring resistivity and sheet resistance.[2]
How it works
General reference — not yet source-verifiedA resistivity test and probe system measures electrical properties by contacting a conductive sample and determining resistivity and sheet resistance.
A four-point resistivity system separates current injection and voltage sensing so the measurement is based on the sample rather than on contact resistance.
Applications
The instrument is used for resistivity and sheet resistance measurement on wafers from two to twelve inch.[2]
What do the numbers mean?
Wafer handling1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Kokusai VR 120 S Resistivity are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai VR 120 S Resistivity are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kokusai VR 120 S Resistivity are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai VR 120 S Resistivity are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Kokusai VR 120 S Resistivity are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Kokusai VR 120 S Resistivity is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]asef.a-star.edu.sg — asef.a-star.edu.sgasef.a-star.edu.sg
- [3]waferpedia.comwaferpedia.com
Last updated Sep 26, 2026.
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