Laurell
EDC-650-23 B
The Laurell EDC-650-23 B is an EDC System in the 650-series. The Laurell EDC-650-23 B has a maximum substrate size of ø 150mm (5" × 5"). The Laurell EDC-650-23 B has a maximum speed of 12000 rpm.[1]
What it is
General reference — not yet source-verifiedA spin coater is a resist-processing tool that spreads liquid coatings on a substrate by rotation. Spin coaters are used to form thin, uniform films on flat workpieces before later patterning or thermal steps.
How it works
The EDC-650-23 B is offered with tabletop, in-deck, and on-deck mounting options. The model belongs to Laurell's 650-series platform.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe EDC-650-23 B sits in the front end of resist processing, before exposure and development. The tool prepares the substrate by applying a coating that supports subsequent lithographic pattern transfer.
Applications
General reference — not yet source-verifiedThe EDC-650-23 B is used for resist coating on flat substrates. The machine class is used for thin-film deposition processes that require controlled spreading of liquid materials.
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of machine is the Laurell EDC-650-23 B?
The Laurell EDC-650-23 B is an EDC system spin coater in the 650-series.[1]
Not publicly documented
The following facts about the EDC-650-23 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-650-23 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EDC-650-23 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EDC-650-23 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EDC-650-23 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EDC-650-23 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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