Laurell
H6-23 B
The Laurell H6-23 B is a Spin Coater. The Laurell H6-23 B belongs to the 650-series. The Laurell H6-23 B has a maximum substrate size of ø 150mm (5" × 5").[1]
What it is
The Laurell H6-23 B is a spin coater for resist processing. The H6-23 B belongs to Laurell’s 650-series and uses a tabletop, in-deck, or on-deck mounting arrangement.[1]
How it works
General reference — not yet source-verifiedA spin coater applies a liquid film to a substrate while the substrate rotates. Centrifugal force spreads the liquid across the surface and removes excess material.
A spin coating tool is used with flat substrates that need a thin and uniform coating. The machine holds the substrate on a rotating chuck and controls speed during the coating cycle.
Where it fits in the process flow
General reference — not yet source-verifiedA spin coater sits in the resist coating stage of a lithography flow. The machine is used before exposure and pattern transfer steps.
The H6-23 B is suited to substrate preparation steps that require a controlled resist layer on a wafer or other flat carrier.
Applications
General reference — not yet source-verifiedThe H6-23 B is used for resist coating on flat substrates. The machine class is used in lithography-related processing for forming uniform thin films.
Spin coating tools are also used for other liquid coatings that require an even layer on the work surface.
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the H6-23 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the H6-23 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the H6-23 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the H6-23 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the H6-23 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the H6-23 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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The Laurell EDC-HL-23 B is an EDC System 650-series spin coater with a maximum substrate size of 150 mm (5" x 5") and a maximum speed of 12000 rpm.