Pfeiffer
HiPace300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Pfeiffer HiPace300 is a turbo pump used as the secondary pump in the loadlock of the Alliance-Concept EVA 451 thermal evaporator.[1]
Plate 01Pfeiffer Vacuum HiPace 300 Plus PM P03 989, DN 100 CF Turbo Pump w TC 110
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Wafer size
100mm
Vacuum
Turbo pump[1]
What it is
The Pfeiffer HiPace300 is a turbo pump used in a deposition tool's loadlock pumping system.[1]
How it works
The Pfeiffer HiPace300 serves as the secondary pump on the loadlock side of the deposition system. The loadlock also uses a dry primary pump.[1]
Where it fits in the process flow
The Pfeiffer HiPace300 belongs to the loadlock vacuum train of the deposition tool. The loadlock supports shuttle loading and unloading before the sample moves into the coating chamber.[1]
Applications
The deposition system is dedicated to coating conductive layers for non-conductive samples before electron-beam exposure. The same system is used to avoid charging issues during that preparation step.[1]
The tool uses thermal sources for chromium and aluminum coatings. The loadlock pumping subsystem supports that coating workflow by enabling sample transfer into the evaporator under vacuum.[1]
- Used as a loadlock secondary turbo pump in an evaporator system
What do the numbers mean?
Vacuum & pumping3
- Application context
- Loadlock secondary pump in Alliance-Concept EVA 451 thermal evaporator[1]
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the HiPace300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HiPace300 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HiPace300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HiPace300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the HiPace300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the HiPace300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
Last updated Oct 8, 2026.
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