Strasbaugh
6 DT
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Strasbaugh 6 DT is a CMP polisher. The Strasbaugh 6 DT requires 3-phase 480V electrical power.[1][2]
What it is
How it works
General reference — not yet source-verifiedCMP tools use a rotating platen with a polishing pad and a chemical slurry to planarize wafer surfaces through a combination of chemical etching and mechanical abrasion.
The Strasbaugh 6 DT is a polisher; in a CMP system, a wafer is held by a carrier and pressed against the rotating pad under controlled downforce.
Where it fits in the process flow
General reference — not yet source-verifiedCMP planarization steps are used in semiconductor fabrication to remove topography from deposited layers, enabling subsequent photolithography with sufficient depth of focus.
Applications
General reference — not yet source-verifiedCMP tools such as the Strasbaugh 6 DT are used to planarize interlayer dielectrics, shallow trench isolation (STI) structures, and metal interconnect layers such as copper or tungsten.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 6 DT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6 DT are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6 DT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6 DT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6 DT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6 DT is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]6 DT — Strasbaugh | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 23, 2026.
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