SUSS MicroTec
AS 8 Alta Spray
The SUSS MicroTec AS 8 Alta Spray is a manual spray coater for high topographies. The SUSS MicroTec AS 8 Alta Spray supports wafer sizes of 3, 4, 5, 6, and 8 inch. The SUSS MicroTec AS 8 Alta Spray supports substrates up to 200 mm and square substrates up to 6 inch edge length.[1][2]
What it is
How it works
Applications
The AS 8 Alta Spray is used for research and low-volume production work.[1]
The AS 8 Alta Spray is used for coating substrates up to 200 mm and square substrates up to 6 inch edge length.[1]
The AS 8 AltaSpray is used for MEMS, three-dimensional integration, wafer-level packaging, and related applications that require conformal resist films over corners, cavities, through-silicon vias, and lenses.[5][4]
The AS 8 AltaSpray is used with resist materials including SU-8, S1800, and AZ formulations.[4]
What do the numbers mean?
Vacuum & pumping2
- Pressure tank system 10 L SS with coupling[2]
Wafer handling7
- Substrate assembly R6 Altaspray BSR ready[2]
Gas & chemistry9
- High precision resist spray dispense system up to 30 CPS, Resist type[2]
- Pre wet dispense nozzle Altaspray, bowl clean solvent type[2]
- Filter unit solvent[2]
- Resist storage stainless steel (x2)[2]
- Resist spray dispense system
- High precision resist spray dispense system up to 30 CPS, Resist type[2]
Configuration & options16
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationHigh precision resist spray dispense system up to 30 CPS, Resist type[2]
- ConfigurationPre wet dispense nozzle Altaspray, bowl clean solvent type[2]
- ConfigurationFilter unit solvent[2]
- ConfigurationResist storage stainless steel (x2)[2]
- ConfigurationPressure tank system 10 L SS with coupling[2]
- Resist spray dispense systemHigh precision resist spray dispense system up to 30 CPS, Resist type[2]
- Pre-wet dispense nozzleAltaspray, bowl clean solvent type[2]
- Pressure tank system10 L SS with coupling[2]
- Resist storageStainless steel (x2)[2]
- NozzlesDual spray nozzles and separate solvent nozzle[1]
- Filter unitSolvent[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the SUSS AS 8 Alta Spray support?
The AS 8 Alta Spray supports wafer sizes of 3, 4, 5, 6, and 8 inch, and round substrates up to 200 mm. Square substrates up to 6 inch edge length are also supported.[2][1][4][3]
What is the spray axis velocity range?
The spray axis velocities can reach up to 500 mm/s, with acceleration up to 9 m/s².[1][3]
What is the z-axis adjustment range of the nozzle?
The z-axis adjustment range is up to 45 mm, and the nozzle adjustment range is from 67.5 mm to 107.5 mm.[1][3]
Not publicly documented
The following facts about the AS 8 Alta Spray are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AS 8 Alta Spray are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AS 8 Alta Spray are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AS 8 Alta Spray are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AS 8 Alta Spray are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AS 8 Alta Spray is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]suss.com — suss.comsuss.com
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]nnci.net — nnci.netnnci.net
- [5]SUSS MicroTec AS8 AltaSpray - The Singh Center for Nanotechnology Wiki — wiki.nano.upenn.eduwiki.nano.upenn.edu
Last updated Oct 7, 2026.