SUSS MicroTec
AS 8 Spray
What it is
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical1
- Power Supply[1]
Wafer handling9
- Supports substrates up to 200mm or 300mm in diameter, and square substrates up to 6" edge length[1]
- Recipe Transferability[1]
- Process Kit Parts Plate and Chuck[1]
- Substrate size
- Substrates up to 200mm or 300mm in diameter, and square substrates up to 6" edge length[1]
- Dual-nozzle / single-nozzle substrate support
- Dual-nozzle mode for Ø150 mm and Ø200 mm substrates; single-nozzle mode for Ø3", Ø100 mm, Ø150 mm and Ø200 mm substrates[2]
Gas & chemistry3
Control & software4
- Recipe capability
- Programmable recipes: all spray and cleaning parameters can be customized and saved[1]
Configuration & options18
- Semi Automatic[1]
- Dual Dispense System
- up to two separate spray dispense system to prevent cross-contamination[1]
- Uniform Coating[1]
- Proprietary Spray Design[1]
- Low Viscosity Solutions[1]
- With:[1]
- Process Ring[1]
- Display / GUI[1]
- Keyboard, Mouse Pad[1]
- Spanner Wrench[1]
- Ionizer[1]
- Power Box Wall Mount (x5)[1]
- Operation type
- Semi-automatic / semi-automated; manufacturer also describes it as a manual spray coater[1]
- Nozzle configuration
- Dual Dispense System: up to two separate spray dispense systems to prevent cross-contamination[1]
- Spray nozzle range
- Nozzle adjustment from 67.5 mm to 107.5 mm; z-axis adjustment range up to 45 mm[2]
- Topography capability
- Capable of coating 90° corners, KOH etched cavities, Through Silicon Vias (TSVs) or lenses with topographies ranging from a few micron to 600µm or more[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What substrate sizes does the AS 8 Spray handle?
The AS 8 Spray handles substrates up to 200 mm or 300 mm in diameter and square substrates up to 6 inches edge length.[1][2][4]
Is the AS 8 Spray manual or semi-automatic?
Not publicly documented
The following facts about the AS 8 Spray are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AS 8 Spray are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AS 8 Spray are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AS 8 Spray are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AS 8 Spray are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AS 8 Spray is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]suss.com — suss.comsuss.com
- [3]nnci.net — nnci.netnnci.net
- [4]AS 8 Spray — SUSS MicroTec | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [5]SUSS MicroTec AS 8 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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