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SUSS MicroTec

RC 8 Spin

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SUSS RC 8 is a spin coater.[1]

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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

General reference — not yet source-verified

Spin coaters are a class of semiconductor and microelectronics processing equipment used to deposit uniform liquid films onto flat substrates. The substrate is held on a spinning chuck that accelerates to a controlled rotational speed, spreading the fluid by centrifugal force. Spin coaters are essential for photoresist application in photolithography and for other coating steps in wafer fabrication.

Where it fits in the process flow

General reference — not yet source-verified

Upstream processes prepare the wafer surface for coating, while downstream steps include edge-bead removal, post-apply bake, and alignment/exposure. The spin coater thus sits at the beginning of the resist coating loop.

What do the numbers mean?

No specifications recorded yet

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model of this equipment?

The model is RC 8.[1]

Not publicly documented

The following facts about the RC 8 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No specifications for the RC 8 Spin are on record.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RC 8 Spin are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the RC 8 Spin are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the RC 8 Spin are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RC 8 Spin are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Sep 28, 2026.

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