Waferpedia

SUSS MicroTec

SB6 / 8 Gen2

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SUSS MicroTec SB6 / 8 Gen2 is a semi-automated wafer bonding system for wafers up to 200 mm. The SB6 / 8 Gen2 performs wafer bonding.[1]

SUSS MicroTec logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The SUSS MicroTec SB6 / 8 Gen2 is a semi-automated wafer bonding system designed for substrates up to 200 mm in diameter.[1]

The SB6 / 8 Gen2 is part of the SUSS MicroTec wafer bonding product family, which also includes permanent bonding, temporary bonding, and debonding equipment.[1]

How it works

Wafer bonding systems join two or more substrates together using processes such as anodic bonding, fusion bonding, adhesive bonding, metal diffusion bonding, or eutectic bonding.[1]

The system supports bond alignment, which can be performed through top-side or bottom-side alignment, as well as infrared alignment for specific applications.[1]

The equipment handles fragile, thin, or warped wafers, providing edge handling and non-contact pre-alignment for delicate substrates.[1]

Where it fits in the process flow

The SB6 / 8 Gen2 is used in back-end semiconductor manufacturing, particularly in advanced packaging and MEMS production.[1]

The bonding step is typically preceded by plasma activation for fusion bonding and may be followed by debonding processes for temporary bonding applications.[1]

Applications

Application areas include microelectromechanical systems (MEMS), light-emitting diodes (LEDs), and advanced packaging such as flip-chip, wafer-level chip-scale packaging, and 2.5D/3D integration.[1]

The system supports bonding of materials like benzocyclobutene (BCB) and polyimide, as well as high-topography substrates with features up to several hundred micrometers.[1]

  • Wafer Bonding

What do the numbers mean?

Wafer handling1

Wafer size
up to 200 mm[1]
Accurate?

Configuration & options1

Automation
Semi-automated[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Is the SB6 / 8 Gen2 fully automated or semi-automated?

The SB6 / 8 Gen2 is a semi-automated system.[1]

What types of wafer bonding does the SB6 / 8 Gen2 support?

The system supports permanent bonding and temporary bonding, including processes such as anodic bonding, fusion bonding, adhesive bonding, and eutectic bonding.[1]

Not publicly documented

The following facts about the SB6 / 8 Gen2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the SB6 / 8 Gen2 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SB6 / 8 Gen2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SB6 / 8 Gen2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SB6 / 8 Gen2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SB6 / 8 Gen2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]hilpert.ch — hilpert.chhilpert.ch
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Last updated Sep 22, 2026.

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