Thermo Fisher
Scientific FEI Expida 1285 FIB-SEM
The Thermo Fisher Scientific FEI Expida 1285 FIB-SEM is a focused ion beam scanning electron microscope designed for 12-inch wafer inspection and failure analysis. The Thermo Fisher Scientific FEI Expida 1285 FIB-SEM combines an NG/Sirion Sfeg column with a Sidewinder ion column for dual-beam operation.[1][2]
What it is
General reference — not yet source-verifiedA FIB-SEM combines ion-beam milling with electron-beam imaging in a single platform. A machine of this class is used for localized cross sectioning, site-specific sample preparation, and high-resolution inspection of microstructures.
How it works
The Thermo Fisher Scientific FEI Expida 1285 FIB-SEM includes an NG/Sirion Sfeg column and a Sidewinder ion column. The Thermo Fisher Scientific FEI Expida 1285 FIB-SEM includes CDEM detectors and ETD/TLD detectors.[1][2]
The Thermo Fisher Scientific FEI Expida 1285 FIB-SEM has a 5 axis 300mm stage, a capacitance probe, a plasma cleaner, and an oil free vacuum system.[1][2]
Where it fits in the process flow
Applications
What do the numbers mean?
Vacuum & pumping2
- Oil Free vacuum system[1]
Wafer handling1
Optics & imaging8
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Scientific FEI Expida 1285 FIB-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Expida 1285 FIB-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Expida 1285 FIB-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Expida 1285 FIB-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Expida 1285 FIB-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Expida 1285 FIB-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Thermo Fisher Scientific FEI Expida 1285 FIB-SEM family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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