Laurell
WS-650-23
What it is
The Laurell WS-650-23 is a station-mounted spin coater in the WS-650 series. The WS-650-23 model accommodates wafers up to 150 mm and substrates up to 5 inch by 5 inch.[1]
How it works
The WS-650-23 uses a process controller with microprocessor-based control and accompanying PC software. The controller allows real-time operator interaction during a run, including pausing, stopping, and continuing the process.[1]
The WS-650-23 uses vacuum chucks and wafer alignment tools to center wafers on the chuck. The system uses a closed bowl, a labyrinth seal, and nitrogen purge to reduce chemical contamination of the motor and control electronics.[1]
Where it fits in the process flow
The WS-650-23 is used for coating, etching, developing, rinsing-drying, and cleaning. The WS-650-23 is suited to solvent-based, base-based, and acid-based processing.[1]
Applications
The WS-650 series is used with many dispense options, including manual and automatic dispense. The WS-650-23 supports processes involving photoresist, developer, SC-1, and SC-2 chemistries, although the model guidance recommends single-use processing to avoid cross-contamination.[1]
The WS-650-23 can be fitted with removable chamber liners and an optional PTFE housing. The model also offers in-deck mounting and on-deck mounting configurations.[1]
- Solvent, base, or acid-based processing
- Coating
- Etching
- Developing
- Rinsing-drying
- Cleaning
- MEMS spray coating development
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Laurell recommends single-use only due to known material conflicts.
- Photoresist and developer can cause cross-contamination.
- SC-1 and SC-2 create NH4Cl, described as a hazardous inhalation risk.
What do the numbers mean?
Power & electrical1
Vacuum & pumping2
Wafer handling4
Gas & chemistry3
Dimensions & facilities1
Configuration & options3
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power95 to 240VAC, 47/63HZ, ~300 Watts[1]
- Vacuum25–28 inches Hg; suggested flow volume 4.5 SCFM (0.127 cubic meters/minute) at 0 inches Hg[1]
- Vacuum requirement25–28 inches Hg (~635–711 mm Hg) with a flow volume of 4.5 SCFM (0.127 m³/min) at 0 inches Hg[1]
- Seal/process purge gasN₂ at 60–70 PSIG (4–5 bar)[1]
- Gas consumption (standard motor)3 cubic feet per hour (0.085 m³/hour)[1]
- Gas consumption (high-performance motor)20 cubic feet per hour (0.566 m³/hour)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What substrate sizes does the WS-650-23 accept?
The WS-650-23 accommodates wafers up to 150 mm and substrates up to 5 inch by 5 inch.[1]
What is the maximum rotational speed of the WS-650-23?
The WS-650-23 has a maximum rotational speed of 12,000 RPM based on a 100 mm silicon wafer.[1]
What processes is the WS-650-23 used for?
The WS-650-23 is used for coating, etching, developing, rinsing-drying, and cleaning.[1]
What utilities does the WS-650-23 require?
The WS-650-23 requires nitrogen or clean dry air for process and seal purge, vacuum, and electrical power from 95 to 240 VAC at 47/63 Hz.[1]
Not publicly documented
The following facts about the WS-650-23 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-23 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the WS-650-23 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the WS-650-23 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the WS-650-23 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the WS-650-23 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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