Tokyo Electron
The Tel Precio Automatic Wafer Prober is an automatic wafer prober for 12-inch wafers. The Tel Precio Automatic Wafer Prober features a single FOUP wafer loader on the right side. The Tel Precio Automatic Wafer Prober is rated for 200 V, 30 A, 50/60 Hz and 2.9 kVA single-phase power.[1][2]

Wafer size
Single Foup Wafer Loader (Right)
Power
50/60 Hz[1]
The Tokyo Electron Precio Automatic Wafer Prober is an automatic wafer prober used for semiconductor test and probe handling.
A wafer prober sits in the test flow after front-end wafer processing and before singulation, package assembly, and final device test.
The Precio model supports probe-level electrical access to wafer-level devices and therefore belongs in wafer test operations rather than in lithography or deposition steps.
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
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The prober uses optical pattern recognition systems to locate alignment marks on the wafer, then makes precise mechanical adjustments. The chuck moves slowly and gently to contact the probe needles with the pads, using controlled force to avoid damage.
Many systems in this class are designed to accommodate a range of wafer sizes by changing the chuck and adjusting the alignment recipe. The exact sizes depend on the configuration, but the class generally supports multiple substrate diameters.
Throughput depends on the speed of wafer loading, alignment time, the number of dies, and the time spent per die for electrical testing. Optimization of the stepping sequence and parallel testing of multiple dies can increase throughput, but the class inherently has this trade-off between accuracy and speed.
The following facts about the Precio Automatic Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio Automatic Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Precio Automatic Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Precio Automatic Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio Automatic Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio Automatic Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 1, 2026.
The Accretech / TSK UF 300 A is an automatic wafer prober for 8-inch wafers.
The Accretech / TSK UF 3000 is an automatic wafer prober.
The Precio XL Automatic Wafer is a Tokyo Electron automatic wafer prober in the Test & Probe category.